JIB-4700F
Multi Beam System
Advances in the development of new materials featuring complex nanostructures places increased demands on FIB-SEM instruments for exceptional resolution, accuracy and throughput. In response, JEOL has developed the JIB-4700F Multi Beam System to be used in morphological observations, elemental and crystallographic analyses of a variety of specimens.
Features
The JIB-4700F features a hybrid conical objective lens, GENTLEBEAM™ (GB) mode and an in-lens detector system to deliver a guaranteed resolution of 1.6nm at a low accelerating voltage of 1 kV. Using an "in-lens Schottky-emission electron gun" that produces an electron beam with a maximum probe-current of 300nA, this newly-developed instrument allows for high-resolution observations and fast analyses. For the FIB column, a high-current density Ga ion beam of up to 90nA maximum probe-current is employed for fast ion milling and processing of specimens.
Concurrent with high-speed cross-section processing by FIB, high-resolution SEM observations and fast analyses can be conducted utilizing energy dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD). Additionally, a three-dimensional analysis function that automatically captures SEM images at certain intervals in cross-section processing is provided as one of the JIB-4700F's standard features.
High resolution SEM observation
Guaranteed resolution of 1.6 nm at a low accelerating voltage of 1 kV is delivered by a magnetic/electrostatic hybrid conical objective lens, GB mode and in-lens detector.
Fast analysis
Fast analysis is enabled because high resolution can be maintained in analyses under large probe-current by the combination with an in-lens Schottky-emission electron gun and aperture angle control lens.
High speed processing
High-power Ga ion beam column enables rapid processing of specimens.
Enhanced detection system
Simultaneous detection system involving the newly-developed in-lens detectors allows for real-time observation of images from up to 4 detectors.
Versatility
The JIB-4700F is compatible with a variety of optional attachments including EDS, EBSD, cryo-transfer systems, cooling stages and air-isolated transfer systems, etc.
Three-dimensional observation/analysis
Three-dimensional visualization of images and analysis data is possible with the combination with high-resolution SEM and appropriate optional analysis unit(s).
Stage linkage function
With the atmosphere pick-up system (optional) and stage linkage function, TEM (transmission electron microscope) specimens can be retracted with ease.
Picture overlay system
Overlaying an optical microscope image from the atmosphere pick-up system on FIB images makes it easier to identify a FIB processing point.
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Specifications
| SEM | |
|---|---|
| Landing voltage | 0.1 to 30.0kV |
| Image resolution (at optimum WD) | 1.2nm (15kV, GB mode)
1.6nm (1kV, GB mode) |
| Magnification | x20 to 1,000,000
(LDF mode available) |
| Probe current | 1pA to 300nA |
| Detector (*option) | LED, UED, USD*, BED*, TED*, EDS* |
| Specimen stage | Computerized 6-axis goniometer stage
X: 50mm, Y: 50mm, Z: 1.5 to 40mm, R: 360°, T: -5 to 70°, FZ: -3.0 to +3.0mm |
| FIB | |
| Accelerating voltage | 1 to 30kV |
| Image resolution | 4.0nm (30kV) |
| Magnification | x50 to 1,000,000
(x50 to 90 obtained at 15kV or less) |
| Probe current | 1 pA to 90 nA, 13 steps |
| Processing shapes by milling | rectangle, line, spot, circle, bitmap |
Catalogue Download
Application
Application JIB-4700F
Comparison of 3D Imaging Methods in Electron Microscopy for Biomaterials例：（300KB）
Introducing Cryo Scanning Electron Microscopy
Gallery
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Attaching it to JIB-4700F Multi Beam System, makes lift-out operation possible while observing by SEM and FIB.
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IB-07080ATLPS, IB-77080ATLPS Automatic TEM Specimen Preparation System STEMPLING
Automatic TEM Specimen Preparation System STEMPLING is software for automatic TEM specimen preparation by using FIB. This system was developed to satisfy the needs for specimen preparation using FIB, such as easy operation that is possible to anyone, and for the technology enabling creation of a large number of specimens. Owing to STEMPLING, high expert skills are not needed for specimen preparation, enabling anyone to easily prepare specimens. Also, since the system allows for unattended preparation of multiple specimens, work efficiency can be optimized via overnight operation to create a large number of specimens.
STEMPLING can be used with the Multi Beam System JIB-4700F and the Focused Ion Beam Milling & Imaging System JIB-4000PLUS.
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