MultiBeam System (FIB)
A focused ion beam system is an instrument to mill a specimen using an ion beam at high speed and high precision during observation. It is possible to prepare a specimen for a transmission electron microscope (TEM) by automatic milling and 3D analysis.
A multi-beam system equipped with a scanning electron microscope (SEM) is capable of a variety of analyses by attaching a detector.
MultiBeam System (FIB) Lineup
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