miXcroscopy™
Linked Optical & Scanning
Electron Microscopy System

The same specimen holder can now be used for both the optical microscope and the scanning electron microscope. As a result, by managing the stage information with dedicated software, it is possible for the system to record the locations observed with the optical microscope, and then further magnify the same areas with the scanning electron microscope to observe the fine structures at higher magnification & higher resolution.The observation targets found with the optical microscope can be seamlessly observed with the scanning electron microscope without having to search for the target again. It is now possible to smoothly and easily compare and verify the optical microscope images and scanning electron microscope images.
Features
System Outline

Applicable models:<br>
Field Emission Scanning Electron Microscope<br>
Electron Probe Microanalyzer (EPMA)
Data acquisition and intuitive observation with the use of color
By adding visible light color information from the optical microscope image (which cannot be obtained with the SEM image) it provides an SEM image with a more intuitive visual effect.

Smooth target search takes advantage of the features of the optical microscope
Performing observation with th optical microscope makes it possible to easily find the target structures, which are difficult to distinguish using SEM images.

Prevents damage to the specimen from the electron beam
To prevent damage or contamination from the electron beam, finding the area of interest is first performed using the optical microscpe. This enables SEM observation with minimal radiation dose to the observation site.

Applicable models: JXA-8230, JXA-8530F, JXA-8530FPlus
"miXcroscopy™ for EPMA" -Rapid registration of analysis positions -
miXcroscopy™ for EPMA rapidly determines analysis positions for specimens that are difficult to distinguish elements from the backscattered electron image, by installation of polarized light microscope.
Specimen: Mineral thin section

Polarized light OM image: Mag. x50

Backscattered electron image: Mag. x50
"miXcroscopy™ for EPMA" -Precise, fast analysis of OM-registered positions-
Conventional flow
Specimen: Mineral thin section

New flow using miXcroscopy™ for EPMA

miXcroscopy™ for EPMA enables efficient task separation of OM and EPMA. OM searches analysis areas and registers analysis points. EPMA performs elemental analysis. This drastic improvement greatly increases EPMA analysis time.
Application
Application miXcroscopy_EPMA
Related Products

JXA-8530FPlus Field Emission Electron Probe Microanalyzer
JEOL commercialized the world's first FE-EPMA, the JXA-8500F in 2003. This highly regarded FE-EPMA has long been used in various fields, such as: metals, materials and geology in both industry and academia. The JXA-8530FPlus is a third-generation FE-EPMA that comes with enhanced analytical and imaging capabilities. The In-Lens Schottky field emission electron gun combined with new software provides higher throughput while maintaining high stability, thus allowing a wider range of EPMA applications to be achieved with higher resolution.

JXA-8230 Electron Probe Microanalyzer
User-friendly PC-based operation
The EDS, which is a versatile and easy-to-use X ray detector, can be mounted. A combined WDS and EDS system provides a seamless and user-friendly environment for analysis.
More Info


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