JEM-3200FS Field Emission Energy Filter Electron Microscope
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The JEM-3200FS Field Emission Electron Microscope is equipped with a field emission electron gun of 300 kV accelerating voltage and an in-column energy filter which shows high performance. This electron microscope offers solutions for various biological and materials researches.
Features
In-column energy filter (Omega filter)
The in-column energy filter, built into the imaging lens system, makes possible a magnification range comparable to those obtained with conventional electron microscopes, and makes energy filtered images and energy loss spectra easy to acquire. The electron optical system of the energy filter (omega filter) is designed to minimize the distortion of images, and furthermore, residual distortion is finally eliminated in the factory before shipping.
The optional high sensitivity camera system and optional image processing system make possible the construction of an element mapping system and energy loss spectroscopy system.
New control systems
Systemizing basic functions of electron microscopy, such as the electron gun, electron optical system, goniometer, and evacuation system realizes a highly stabilized, high performance control system.
The use of Windows®*1 for the image screens and user interface makes possible the programming of operations and the central control of attachments.
New goniometer
The new systemized goniometer with piezoelectric driving elements shows much improvement in specimen shift at high magnifications*2.
Notices:Windows is a registered trademark of Microsoft Corporation in the United States and other countries.
Only the piezoelectric elements are included in the basic unit. The power supply for the piezoelectric elements is optional.
Specifications
| Configuration※1 | Ultrahigh resolution （UHR） |
High resolution （HR） |
High specimen tilt （HT） |
High contrast （HC） |
|---|---|---|---|---|
| Resolution(nm) | ||||
| Point Lattice |
0.17 0.1 |
0.19 0.1 |
0.21 0.1 |
0.26 0.14 |
| Energy Resolution | 0.9 eV（zero loss FWHM） | |||
| Accelerating Voltage | 300kV，200kV,100kV※2 | |||
| Step size Energy shift |
100V minimum 3,000 V maximum (0.2 V steps) |
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| Electron source | ||||
| Emitter | ZrO/W(100) Schottky emitter | |||
| Brightness | ≧7×108 A／cm2・sr | |||
| Vacuum | About 3×10-8Pa | |||
| Probe current | 0.5nA for 1nm probe | |||
| Power Stability | ||||
| Acc. voltage | 2×10-6／min | |||
| OL current | 1×10-6／min | |||
| Filter lens current | 1×10-6／min | |||
| Objective Lens | ||||
| Focal length | 2.7 mm | 3.0 mm | 3.5 mm | 3.9 mm |
| Spherical aberration | 0.6 mm | 1.1 mm | 1.4 mm | 3.2 mm |
| Chromatic aberration | 1.5 mm | 1.8 mm | 2.2 mm | 3.0 mm |
| Minimum step | 1.0 nm | 1.4 nm | 1.5 nm | 4.1 nm |
| Spot Size (nm φ in diameter) | ||||
| TEM mode | 2 to 5 | 2 to 5 | 7 to 30 | |
| EDS mode | 0.4 to 1.6 | 0.5 to 2.4 | 4 to 20 | |
| NBD mode | 0.4 to 1.6 | 0.5 to 2.4 | - | |
| CBD mode | 0.4 to 1.6 | 0.5 to 2.4 | - | |
| Parameters for Convergent beam Diffraction | ||||
| Convergent angle(2α) | 1.5 to 20 mrad | - | ||
| Acceptance angle | ±10 ° | - | ||
| Magnification | ||||
| MAG mode | ×2,500 to 1,500,000 | ×2,000 to 1,200,000 | ×1,500 to 1,200,000 | |
| LOW MAG mode | ×100 to 3,000 | |||
| SA MAG mode | ×8,000 to 600,000 | ×6,000 to 500,000 | ×5,000 to 500,000 | |
| Field of View | Slit width at 10 eV 60 mm (on film surface) Slit width at 2 eV 25 mm (on film surface) |
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| Camera Length | ||||
| SA diffraction | 200 to 2,000 mm | 250 to 2,500 mm | 400 to 3,000 mm | |
| EELS Dispersion | ||||
| On energy selection slit | 0.85 μm/eV at 300 kV | |||
| On film surface | 100 to 220 μm/eV at 300kV | |||
| Specimen Chamber | ||||
| Specimen travel range (X,Y;Z)(mm) | X,Y : 2 Z : 0.2 |
X,Y : 2 Z : 0.4 |
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| Specimen tilting (X/Y) | ±25°／±25°※3 | ±35°／±30°※3 | ±42°／±30°※3 | ±38°／±30°※3 |
| EDS※4 | ||||
| Solid angle | 0.13 sr | 0.09 sr | ||
| Take-off angle | 25° | 20° | ||
Specify either configuration (UHR, HR, HT or HC) when ordering the JEM-3200FS.
100 kV and 200 kV become possible when using optional short circuit switches for the accelerating tube.
When the Specimen Tilting Holder (EM-31630) is used.
An optional EDS is needed. Specifications apply to a 30 mm2 detector.
Application
Application JEM-3200FS
Gallery
More Info
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