【DISCONTINUED】JSM-7500F Field Emission Scanning Electron Microscope
DISCONTINUED
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Features
A field emission SEM with a semi-in-lens and equipped with a Gentle Beam to deliver high-resolution. Of course, a variety of options can be installed, including element analysis.
Designed for versatility and high resolution
The JSM-7500F features an optical system that includes a semi-in-lens type objective lens, which can collimate the electron beam even at low accelerating voltages. Like a true general-purpose SEM system, JSM-7500F can provide high-resolution imaging of large specimens
Gentle Beam (GB) provides top-surface imaging with ultra-low energy incident electrons
Selective detection of secondary or backscattered electrons with the New r-filter
New r-filter has 4 modes; standard SB (secondary electron detection) mode, standard BE mode (backscattered electron detection), Sb mode (priority for secondary electron), Bs mode (priority for backscattered electron). Sb mode can be used to detect secondary electrons along with backscattered electrons of a desired percentage. Bs mode can be used to detect backscattered electrons along with secondary electrons of a desired percentage.
This function features simple one-touch operation from a user-friendly menu.
Specifications
| Resolution | 1.0nm（15kV）、1.4nm（1kV） | ||
|---|---|---|---|
| Magnification | ×25 to ×1,000,000 | ||
| Accelerating voltage | 0.1kV to 30kV | ||
| Probe current | 1pA to 2nA | ||
| Aperture angle optimizing lens | Built-in | ||
| Detectors | Upper detector, Lower detector | ||
| Energy filter | New r-filter | ||
| Gentle Beam | Built-in | ||
| Digital image | 1,280×960pixels、2,560×1,920pixels, 5,120×3,840pixels |
||
| Specimen exchange chamber | One-action specimen exchange mechanism built-in | ||
| Specimen stage | Eucentric, 5 axes motor control | ||
| Type | IA | II | III |
| X-Y | 70mm×50mm | 110mm×80mm | 140mm×80mm |
| Tilt | －5 to ＋70° | －5 to ＋60° | －5 to ＋60° |
| Rotation | 360° | 360° | 360° |
| WD | 1.5mm to 25mm | 1.5mm to 25mm | 1.5mm to 25mm |
| Evacuation system | Three SIPs, TMP, RP, Fore-line trap | ||
| Eco design | During normal operation : 1.2kVA During the sleep mode : 1kVA During the evacuation system OFF : 0.76kVA |
||
CO2 Emission
| CO2/hour | CO2/year | |
|---|---|---|
| During normal operation | 0.481kg | 4,214kg |
| During the sleep mode | 0.411kg | - |
| During the evacuation system OFF (Ion pump ON) |
0.286kg | - |
Principal Options
Retractable Backscattered Electron Detector
In-lens Backscattered Electron Detector
Energy Dispersive X-ray Spectrometer (EDS)
Electron Back Scatter Diffraction (EBSD)
Transmission Electron Detector
Liquid Nitrogen Trap
Application
Application JSM-7500F
High Angle Backscattered Electrons and Low Angle Backscattered Electrons
Gallery
More Info
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