penetration depth
penetration depth
"Penetration depth" means the maximum depth, at which the incident electrons finally stop after repeatedly scattered and penetrating into a specimen while losing their energy.
The penetration depth is proportional to the incident electron energy and inversely proportional to the density of the specimen.
For example, the penetration depth for solid aluminum (density: 2.7 g/cm-3) is approximately 400 nm at an incident electron energy of 5 keV, but increases as large as approximately 1.0 μm at 10 keV. As another example, it is approximately 60 nm and 150 nm for gold (density: 19.3 g/cm-3) respectively at incident electron energies of 5 keV and 10 keV.
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