energy spread, energy width
energy spread, energy width
An energy width (spread) of an electron probe.
The energy spread of the electron probe depends on the mechanism of electron emission or the type of the electron gun (cathode). As the temperature of the cathode is high, the energy spread becomes large. The thermionic-emission gun which uses a tungsten (W) filament has an energy spread of 1 to 3 eV at the cathode temperature of about 2800 K. The energy spread of the Schottky electron gun is 0.4 to 1 eV at the cathode temperature of about 1800 K. The field-emission electron gun has an energy spread of about 0.3 eV with the cathode operating at room temperature. For SEM, if an electron probe has a large energy spread, it is difficult to acquire a high-resolution image at a low accelerating voltage because the electron-probe diameter becomes large due to chromatic aberration.
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