Energy Filter Transmission Electron Microscopy, EFTEM

A method to form a TEM image using only the electrons having a specific energy among those transmitting through a specimen. Electrons that lose energy in the specimen (inelastically scattered electrons) are subjected to pass through a prism for electrons, and the electrons with a specific energy loss are selected with an energy-selective slit inserted on the energy-dispersion plane to obtain the specimen image using only the electrons with the specific energy loss.

1) When a TEM image is formed using the electrons with energy losses less than ~10 eV, the contrast of the image is enhanced (called the zero-loss image) because the image is formed mainly with the elastically scattered electrons.

2) When a TEM image is formed using the electrons suffered by the energy loss due to excitations of the inner-shell electrons of the specific elements, the distribution of the elements in the specimen is revealed.

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