process time
process time
The process time is a time index to select whether to use the EDS analysis focusing on its energy resolution or focusing on its analysis time (throughput). By changing the process time, an EDS analysis suitable for analysis purpose can be carried out. Some EDS manufacturers name it as "time constant."
In the element analysis by EDS, characteristic X-rays generated from a specimen are subjected to dispersion according to their energy. In the process of EDS, averaging of the noise components of X-ray signals which are detected with a semiconductor detector is performed to obtain accurate energy values of the X-rays. By changing the process time, the averaging time is changed. If the process time (averaging time) is longer, a high-energy resolution EDS spectrum is acquired because the measurement error of the X-ray energy values decreases. However, the X-rays entering the detector in the averaging time cannot be measured, and then the dead time increases. If the process time (averaging time) is shorter, the dead time decreases and the time required for analysis is shortened. However, since the error of the X-ray energy values increases because of a shorter averaging time, the energy resolution is sacrificed.
In the element analysis by EDS, characteristic X-rays generated from a specimen are subjected to dispersion according to their energy. In the process of EDS, averaging of the noise components of X-ray signals which are detected with a semiconductor detector is performed to obtain accurate energy values of the X-rays. By changing the process time, the averaging time is changed. If the process time (averaging time) is longer, a high-energy resolution EDS spectrum is acquired because the measurement error of the X-ray energy values decreases. However, the X-rays entering the detector in the averaging time cannot be measured, and then the dead time increases. If the process time (averaging time) is shorter, the dead time decreases and the time required for analysis is shortened. However, since the error of the X-ray energy values increases because of a shorter averaging time, the energy resolution is sacrificed.
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