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live time scan

live time scan

Live time scan is an EDS measurement technique to scan an electron probe over an area by varying the dwell time of the probe so that the effective measurement time (live time) for characteristic X-rays becomes equal at each scanning point.
If the dwell time is set to a definite time for all the scanning points, the dead time (rate) for the scanning points with a large X-ray generation increases. Thus, the generated X-rays are counted smaller than the true counts. As a result, the concentration of the element concerned is underestimated. To avoid this phenomenon, the dwell time at each scanning point is varied so as to make the live time equal for all the points (live time scan). Therefore, the live time scan enables us to acquire the correct two-dimensional element map of the specimen. 

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