mean free path
mean free path
The average traveling distance of an electron before a scattering event takes place. As the energy of the electron beam is larger, the "mean free path" for scattering is larger. It becomes smaller as the atomic number of the constituent atoms is larger and as the acceptance angle of the incident electron beam is larger. The mean free path for the total inelastic scattering for an electron beam at 200 kV is about 150 nm. A simple estimation has been proposed that the mean free path (nm) is given by a value of about 80% of the incident electron energy (keV). The mean free path for inelastic scattering is about 1/20 that for elastic scattering.
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