molecular beam epitaxy, MBE
molecular beam epitaxy
"Molecular beam epitaxy (MBE)" is a technique to deposit and grow a crystalline film in an ultra-high vacuum. In MBE, target elements or target materials that will constitute a target crystal are heated and evaporated and then, the target crystalline film is deposited and grown on a heated crystalline substrate. MBE is similar to vacuum evaporation (deposition), but the technique accurately controls the molecular beam to prepare a crystalline specimen controlled at the atomic scale. MBE is used also for specimen preparation for a TEM.
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