Pirani (vacuum) gauge
Pirani (vacuum) gauge
A thermal conductivity (vacuum) gauge that utilizes a phenomenon where electrical resistance of a heated element changes with temperature. In the Pirani (vacuum) gauge, a metal (tungsten) wire placed inside a tube is heated by electric current. Thermal conductivity of the metal wire changes with the degree of vacuum through change of the temperature of the wire. The measurable range is 0.1 to 103Pa. For a TEM, the gauge is used to detect the switching pressure from the rotary pumping (RP) to the diffusion pumping (DP).
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