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low energy electron microscope, LEEM

low energy electron microscope

A "LEEM (low energy electron microscope)" is an instrument to obtain a surface image of a specimen. The incident electron energy is reduced to several V to several 10 V, and elastically-backscattered electrons from a specimen are accelerated by an electric field just above the specimen. The formed image is enlarged by the imaging lens and observed through a screen or a camera. The spatial resolution of LEEM is 5 to 10 nm. A dark-field image can be obtained by selecting a diffraction spot of LEED (low energy electron diffraction) with an aperture. The specimen area is kept at an ultrahigh vacuum to obtain surface structural information. LEEM is often accompanied with a function of PEEM (photo emission electron microscope) which has the same imaging system as that of LEEM.

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