vacuum evaporator
vacuum evaporator
A "vacuum evaporator" is an instrument to form a thin substance layer on a surface of a substrate by vacuum evaporation (deposition). The vacuum evaporator consists of a heating element, a case and a substrate in a vacuum chamber. A substance (in most cases, a metal) that is placed in the case is evaporated by melting at high temperature, and a thin film (layer) is formed on the substrate. In specimen preparation for a TEM, a heating element, such as a tungsten (W) wire or a tantalum (Ta) plate, is resistively-heated and the substance is evaporated (deposited).
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