electron backscatter diffraction, EBSD
electron backscatter diffraction
A Kikuchi pattern, which is produced by inelastically backscattered electrons emitted from a specimen, sensitively changes with specimen orientation. "Electron backscatter diffraction (EBSD)" is a method for obtaining crystal-orientation distribution images of crystal grains of a polycrystalline specimen. To obtain the image, the incident electron beam (probe) is scanned over the specimen surface, and the orientation change of the Kikuchi pattern is observed. EBSD provides an image with a spatial resolution of ～0.1 μm and an angular resolution of ～1°. The angular range acquired by EBSD is ～20°. Normally, EBSD is performed in a SEM though this may be performed also in a TEM.
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