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k factor

k factor

A factor used for the Cliff-Lorimer method in EDS analysis. For the determination of the k factor, a substance composed of two elements A and B, whose composition is similar to the target substance, is used as a standard specimen. Characteristic X-ray intensities IA and IB of the standard specimen are measured. And then the k factor is determined by equation k = CA/CB・IB /IA using the known compositions CA and CB. The k factor is theoretically given by equation k = (MAQBωBαB)/(MBQAωAαA), where M, Q, ω and α are atomic weight, ionization cross section, fluorescent yield and the ratio of Kα line to the total K lines of a substance, respectively. It is noted that the accuracies of Q and ω are low. In actual cases, the absorption due to the window material is also needed to be taken into account. For the elements up to 3d metals, it is said that the error between the quantitative analysis using experimental k factor and that with the theoretical k factor is about 10%. For a substance composed of elements with greatly different atomic numbers, the accuracy of the analysis is low.

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