fluorescence excitation effect
fluorescence excitation effect
In spectroscopic analysis of characteristic X-rays (EDS), the "fluorescence excitation effect" means that X-rays emitted from non-target elements, whose energy is higher than that of the characteristic X-rays of the target element, are absorbed by the target element and characteristic X-rays of the target element are additionally emitted. Since this effect cannot be neglected in quantitative analysis when a specimen is thicker (～several 10 nm or thicker though depending on target elements), correction for the detected X-ray intensity is required. This effect is, however, smaller than the absorption effect.
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