cryo pump
cryo pump
The cryo-pump produces a cryogenic surface using a coolant such as liquid helium. Residual gas molecules are adsorbed to this surface resulting in a high vacuum. The working pressure is from 10-2 to 10-13 Pa. However, the pump is not suitable for adsorption of hydrogen, helium and neon. In the specimen chamber in a TEM, a fin cooled by liquid nitrogen is used to produce high vacuum.
Term(s) with "cryo pump" in the description
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