absorption effect
absorption effect
In spectroscopic analysis of characteristic X-rays (EDS), the "absorption effect" means that part of X-rays generated within a specimen is absorbed by the specimen. Since this effect cannot be neglected when a specimen is thicker (～several 10 nm or thicker though depending on target elements), correction for the detected X-ray intensity is required in quantitative analysis. The correction of the absorption effect is crucial for thick specimens because this effect is larger than the atomic-number effect and the fluorescence excitation effect.
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