ion sputtering

"Ion sputtering" is a phenomenon where atoms are sputtered from a solid surface when ionized and accelerated atoms or molecules hit the solid surface. This phenomenon is utilized for formation of a thin film on a solid surface, specimen coating and ion etching. In the case of specimen coating, discharge is generated in a low vacuum or in an Ar gas environment under a vacuum, the ionized gas is accelerated and hits a target material (Au, Pt, etc.) at the anode. Then, the material is emitted from the target surface and deposit on a specimen at the cathode, specimen being coated.

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