Handbook of Soft X-ray Emission Spectra Version 9.0
(May 2025)
Soft Xray emission spectroscopy (SXES) can probe solid state effect (chemical bonding state) of material by analyzing low-energy X-rays from extreme ultraviolet (EUV) to soft X-ray energy regions.
This spectroscopy has been combined with modern transmission electron microscopy (TEM), and applied to commercial electron probe microanalysis (EPMA) / scanning electron microscopy (SEM). Since there are many atomic resonances in soft X-ray energy region (≤ 8 keV), SXES combined with electron microscopy provides a sensitive tool for elemental and chemical identification based on microscopic observation, which can make many application opportunities.
The aim of this booklet is to provide basic knowledge of soft X-ray emission spectroscopy and reference spectra for commercially available materials.
Masami Terauchi1), Masato Koike1), Hideyuki Takahashi2), Masaru Takakura2), Takanori Murano2) and Shogo Koshiya2)
IMRAM, Tohoku University1) and JEOL Ltd.2)
Related Products
Soft X-ray Emission Spectrometer(SXES)
The Soft X-Ray Emission Spectrometer (SXES) is an ultra-high resolution spectrometer consisting of a newly-developed diffraction grating and a high-sensitivity X-ray CCD camera.
In the same way as EDS, parallel detection is possible, and 0.3 eV (Fermi-edge, Al-L standard) ultra-high energy resolution analysis can be performed, surpassing the energy resolution of WDS.
