Handbook of Soft X-ray Emission Spectra Version 7.0 (Dec. 2021)
Soft X-ray emission spectroscopy (SXES) is used to probe solid state effects, the energy state of bonding electrons. This spectroscopy has recently combined with modern transmission electron microscopy (TEM), and applied to commercial electron probe microanalysis (EPMA)/scanning electron microscopy (SEM). Since there are many atomic resonances in soft X-ray energy region (< several keV), SXES combined with electron microscopy provides a sensitive tool for elemental and chemical identification method based on microscopy, which can make many application opportunities.
Masami Terauchi1), Hideyuki Takahashi2), Masaru Takakura1, 2), Takanori Murano2) and Shogo Koshiya2)
IMRAM, Tohoku University1) and JEOL Ltd.2)
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Contents
| P1 | Introduction |
|---|---|
| P3 | Characteristics of SXES |
| P5 | X-ray Emission process |
| P7 | Signal performance comparison between commercial EPMA SXES and AES |
| P10 | Rules for X ray emission |
| P13 | Comparison of experiment and calculation |
| P14 | Development of commercial SXES system |
| P15 | Extend to higher energy region |
| P17 | Information of L emissions of 3d transition metal elements |
| P19 | Anisotropic soft X ray emission |
| P21 | Effect of Eg and ΔEB for the onset energy of a spectrum |
| P22 | Effect of Eg and ΔEB observed in Al and Si L-emissions |
| P24 | Relation between atomic energy levels and SXES spectrum |
| P26 | Valence bands observation of polymer: polyethylene |
| P28 | Part 1 : SXE spectra obtained by reference materials |
| P62 | Part 2 : SXE survey spectra obtained by each reference material |
| P280 | Part 3 : Application data using SXES |
| P281 | Variety of B K-emission due to different chemical bondings |
| P282 | Chemical state mapping of Na doped CaB6 bulk specimen |
| P284 | Fe-B alloy map and extracted B K spectra formed on the steel |
| P285 | Anisotropic B K-emission mapping of AlB2 |
| P287 | Chemical bonding state of amorphous carbon nitride film |
| P289 | Carbon K-line spectrum of polymers obtained by SXES |
| P292 | Appendix 1 : Nitrogen K-line spectrum of polymers obtained by SXES |
| P293 | Low concentration nitrogen map in duplicated stainless steel |
| P294 | Elemental spectral maps and chemical state analysis of Fe L in a basalt mineral |
| P295 | Chemical state investigation of Fe and S L-lines in the Brahin pallasite meteorite |
| P296 | Soft X-ray self-absorption structure (SX-SAS) analysis of Fe |
| P298 | Chemical state analysis of Silicon negative electrode material using SEM-SXES |
| P302 | Appendix 2 : Chemical bonding state analysis with Si L-line spectra of silicate minerals using SXES |
| P304 | Reference: Related documents of electron-beam induced SXES |
| P312 | Reference: Periodic tables of SXES X-ray energy |
| P316 | Electron configuration and index |
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