The Soft X-Ray Emission Spectrometer (SXES) is an ultra-high resolution spectrometer consisting of a newly-developed diffraction grating and a high-sensitivity X-ray CCD camera.
In the same way as EDS, parallel detection is possible, and 0.3 eV (Fermi-edge, Al-L standard) ultra-high energy resolution analysis can be performed, surpassing the energy resolution of WDS.
Click the "replay" button in the box above, and the movie will start(for 4 minutes)
The newly-developed spectrometer optical system design enables simultaneous measurement of spectra with different energies, without moving the diffraction grating or detector (CCD). With the high energy resolution, chemical state analysis mapping can be performed.
Comparison of SXES, WDS and EDS
Spectra for titanium nitride with various spectrometry methods
For titanium nitride, the peaks of N-Kα and Ti-Ll are overlapped. Even with WDS, and waveform deconvolution using a mathematical method is required. As illustrated in the figure below, there is a high energy resolution with SXES, allowing for TiLl to be observed.
(Fermi edge Al-L)
|8 eV (FWHM@Fe-K）
|Chemical bond state analysis
|Yes (mainly light elements)
(But multiple spectrometers possible)
|Spectral elements & detector
|Analyzing crystal + Proportional counter
（reference value with B）
Li-ion battery (LIB) Analysis Example
The example below shows large area maps of LIB samples with different charge states. SXES can map the Li-K peak at both the valence band state (left) and the ground state (middle). A carbon distribution map (right) can also see the function on the LIB that is fully discharged.
Fully-charged, Li-K specimen spectrum
Note: In Li-oxide it is difficult to detect Li-K emission
Light element measurement example
Measurements of carbon compounds using SXES
It is possible to measure the differences between diamond, graphite and polymers. The differences can be observed with the additional peaks from π and σ bonding. As mapping takes a spectra from each pixel, additional maps can be generated for peak shifts of 1 eV and shoulder peaks.
Measurements of various nitrogen compounds
For nitrogen as well, the chemical bonding state can be analyzed from the spectrum peak shape. The peak shapes for nitrates and nitride are completely different, and it is even possible to observe the unique peak shape for ammonium salt, which is very beam sensitive.
Energy resolution 0.3eV（Al-L spectrum measured ＠73eV）
Acquisition energy range: Diffraction grating JS50XL energy region 50-170eV
Acquisition energy range: Diffraction grating JS200N energy region 70-210eV
Spectrometer chamber mounting points:
EPMA WDSport: No.2 port (right side from front)
FE-SEM WDS port (left rear from front)
Spectrometer dimensions: W 168mm×D 348mm ×H 683mm
Distance including CCD from the interface
Spectrometer mass 25kg
EPMA ： JXA-8530F, JXA-8230, JXA-8500F, JXA-8200
SEM ： JSM-7800F, JSM-7800 Prime, JSM-7100F