Features
For easy preparation of TEM thin film samples of heat sensitive materials
Minimizes thermal damage during ion irradiation using liquid nitrogen
Long cryo retention time to fully eliminate damage
Specimen exchange with liquid nitrogen injected
Maximum sample size: 2.8 mm (L) x 1.0 mm (W) x 0.1 mm (T)
Specifications
| IB-09060CIS | ||
| Ion accelerating voltage | 1 to 8kV | |
| Tilt angle | Up to 6°(0.1°step) | |
| Ion-beam diameter | 500 µm or more (full width at half maximum) | |
| Milling speed | 5 µm/min(accelerating voltage: 8 kV, Si equivalent value) | |
| Gas | Argon | |
| Maximum specimen size | 2.8mm(L)×1.0 mm(W)×0.1mm(T) | |
| 試料冷却 | Specimen-holdercooling temperature | -120℃ |
| Time for cooling attainment | 1h | |
| Cooling-retention time | 8h | |
| Specimen take-out time | 30min | |
| Pressure measurement | Penning gauge | |
| Main vacuum pump | Turbo-molecular pump | |
| CCD Camera | Built-in | |
| Dimensions and masses | Basic unit | 500mm(W)×600mm(D)×542mm(H)、70kg |
| Rotary pump | 150mm(W)×427mm(D)×230.5mm(H)、16kg | |
| Display | 326mm(W)×173mm(D)×380mm(H)、3.7kg | |
Installation Requirements
| IB-09060CIS | |
| Power | Single-phase AC 100 to 120 V±10 %, 50/60 Hz,0.5 to 0.6 kVA |
| Grounding | 100Ω or less |
| Argon gas | Pressure: 0.15±0.05 MPa (1.0 to 2.0 kg/cm2)Purity: 99.9999% or more (argon gas, gas cylinder and regulator should beprovided by the customer)
Hose joint: JIS B0203, Rc 1/4 |
| Room temperature | 20 to 25℃ |
| Humidity | 60% or less |
Specifications subject to change without prior notice.
Application
Application IB-09060CIS
More Info
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