Features
Innovative Specimen Preparation Method for TEM / STEM / SEM / EPMA / AUGER
The Ion Slicer can prepare thin-film specimens without solvents or chemicals and requires no prior treatment of the specimen other than rectangular slicing (no disc grinding or dimple grinding).
The Ion Slicer prepares thin-film specimens faster and easier than conventional preparation tools. A low-energy, low-angle Ar ion beam irradiates the specimen while a thin shield belt allows low-angle irradiation of the Ar ion beam (from 0° to 6°), drastically reducing ion-beam irradiation damage to the specimen. The result is a high-quality thin film with few sputtering artifacts--even in soft materials. The Ion Slicer can efficiently prepare thin films from specimens having different compositions, even those having porous composites.
Highlights include:
High quality TEM pre-treatment
Fast preparation
No complicated pre-treatments
Minimal surface damage
Specifications
| EM-09100IS | ||
| Ion accelerating voltage | 1 to 8 kV | |
| Tilt angle | Up to 6° (0.1°step) | |
| Beam diameter | 500 μm (FWHM) | |
| Milling rate | 5m/min (8 kV, silicon) | |
| Gas for beam irradiation | Argon | |
| Recommended specimen size | 2.8 mm (in length) 0.5 mm (in width) 0.1 mm (in thickness) | |
| Pressure measurement | Penning gauge | |
| Main evacuation system | Turbo-molecular pump | |
| CCD camera | Built-in | |
| Dimension and weight | Main console | 500 mm (W) ×600 mm (D) ×542 mm (H)、63 kg |
| Rotary pump | 150 mm (W) ×427 mm (D) ×230.5 mm (H)、16 kg | |
| LCD monitor | 326 mm (W) ×173 mm (D) ×380 mm (H)、3.7 kg | |
Installation Requirements
| EM-09100IS | |
| Power | Single phase, AC100 to 120V, 50/60 Hz, 500 to 600VA |
| Grounding terminal | 100 ohms or less |
| Argon gas | Pressure: 0.15±0.05MPa(1.0 ∼ 2.0kg/cm2)
Argon gas flow rate: About 0.2 ccm Purity: 99.9999% or more Hose joint: JIS B0203 Rc 1/8 *Argon gas (including piping and gas container) and a regulator should be provided by customer. |
| Temperature | 20 to 25℃(fluctuation: 1°C/hor less) |
| Humidity | 60% or less |
Please provide a table for mounting the equipment.
Specifications subject to change without prior notice.
Application
Application EM-09100IS
More Info
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