JEM-2100: Applications in Nanotechnology

This article sums up a two-year experience of employing a JEOL JEM-2100 (LaB6) high resolution electron microscope for structural characterization of nano-materials. The instrument was integrated with a scanning device comprising ADF and BF detectors and with an EDS system for elemental analysis. Despite the fact that the microscope was installed in a small room without a special basement, with a standard air-conditioner, and no special precautions were taken to avoid variations in air temperature or to attenuate sound-and-vibration disturbances, the microscope has provided excellent around the clock performance. In the HRTEM mode it was possible to achieve lattice resolution of 1.17 ﾃ; the resolution capability of the instrument afforded by STEM was about 10nm. The capabilities of the system are demonstrated in a few examples of nano-materials research applications.