JBX-3050MV/S is a variable-shaped electron beam lithography system for mask making of 45 nm nodes. Its cutting-edge technology achieves high speed, high precision and high reliability. This EB system uses a variable-shaped 50 kV electron beam and a step-and-repeat stage.
Features
The JBX-3050MV/S is an electron beam lithography system for mask/reticle fabrication that meets the design rule of 45 nm. This system features pattern writing with high speed, high accuracy and high reliability, achieved by high-end technology.
Specifications
| Stitching accuracy | ≦±3.8 nm |
|---|---|
| Overlay accuracy | ≦±7 nm |
More Info
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