Integrated Analysis Platform
FEMTUS™

FEMTUS™ is a platform that integrates all information acquired by a TEM (Transmission electron microscope) – including TEM images, STEM (Scanning transmission electron microscope) images, EDS (Energy-dispersive X-ray spectroscopy) , EELS (Electron energy-loss spectroscopy) , and more in a single operation environment.
It enables centralized management of diverse data obtained from various detectors mounted on a transmission electron microscope, allowing efficient and intuitive data analysis on a single software platform.
This allows for smooth operation of complex analysis tasks and significantly enhances both the speed and accuracy of research and development.

Features

The newly developed FEMTUS™ Integrated Analysis Platform enables the centralized management and processing of a wide range of data obtained from various detectors embedded in the transmission electron microscope. The GUI has a simple layout that is easy to use for both beginners and advanced users.

Measurement conditions can be set in a single window, and multiple data acquisition is possible, such as performing various measurement methods at the same time.

One of the advantages of simultaneous acquisition is to enable analyses by selecting features from different measurement. For example, by using EDS for heavy elements and EELS for light elements, high S/N ratios can be obtained for all elements, enabling efficient analysis.

EDS (Energy-dispersive X-ray spectroscopy)

• Seamless transition from TEM/STEM imaging to analysis. ^{*1 *2}

• High-precision qualitative and quantitative analysis. (point analysis, line analysis, mapping)

• Arbitrary rectangular mapping within a selected area of the scanned image.

• Continuous composite analysis, including not only point analysis but also line analysis and mapping.

• The range and position of the drift correction area can be set arbitrarily, supporting high-speed, lossless drift correction. ^*3

• Supports "Playback analysis" to verify sample changes during elemental mapping.

• Supports Dual-SDDs, allowing individual signal acquisition from each detector.

• Compatible with PyJEM scripts.

*1 Uses JEOL's MDP (Multi-Dimensional Processor) scan generator.
*2 TEM imaging is FEMTUS™-compatible camera.
*3 High-speed, lossless drift correction is available for the entire range.

Continuous composite analysis (Point･Line･Mapping)

Continuous composite analysis enables not only point analysis but also line analysis and mapping. It is possible to adjust the resolution for each field of view.

Playback analysis

EELS (Electron energy-loss spectroscopy)

Results of two-dimensional elemental mapping using EELS on FEMTUS™ are shown below. Two-dimensional distributions of light elements such as carbon, nitrogen, and oxygen, which are difficult to analyze by EDS due to their low X-ray generation efficiency, are clearly detected. The distribution of nitrogen and titanium, which are difficult to analyze by EDS because of the close energies of their characteristic X-rays, is also clearly distinguished. By combining EELS analysis with a hybrid pixel detector that integrates high dynamic range and high-speed data acquisition with high sensitivity and low noise, the inner shell excitation information with zero loss and high S/N ratio without intensity saturation have been obtained at the same time in a single exposure.

Sample : MOS transistor

• The GUI varies depending on the software version.

FEMTUS™ Viewer

You can view data acquired with FEMTUS™.
You can download the FEMTUS™ Viewer from the button link below.

• Only data acquired with FEMTUS™ Version 2 can be used with the FEMTUS™ Viewer.

• Open [Version Information] from the [Help] menu. The FEMTUS™ version is displayed in the area outlined in red in the image.

• This software cannot be installed on PCs other than Windows®.

• Windows is a registered trademark or trademark of Microsoft Corporation in the United States and/or other countries.

• Do not install the FEMTUS™ Viewer on PCs where the FEMTUS™ online or offline version is already installed.

• If you have the FEMTUS™ online or offline version, please download the FEMTUS™ Viewer of the same version.

• If you do not have the FEMTUS™ online or offline version, please download the latest version of the FEMTUS™ Viewer.

Specifications

Please refer to the brochure.

Catalogue Download

FEMTUS™ Integrated Analysis Platform -EDS Edition-

JEM-F200 with FEMTUS™

Related Products

Transmission Electron Microscope (TEM)

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