JED-2300T
Energy Dispersive X-ray
Spectrometer

JED-2300T AnalysisStation is an elemental analysis system that can execute a seamless operation from observation to analysis.

AnalysisStation JED-2300T is an integration system of TEM/EDS based on a concept of “Image and Analysis”. Data management is carried out by automatically collecting the parameters such as magnification and accelerating voltage along with analysis data.

Features

Three types of Silicon Drift Detector (SDD) EDS are available, with the detection area being 30mm2, 60mm2 and 100mm2 respectively. The larger the detection area is, the greater the detection sensitivity becomes. By incorporating Dry SD100GV Detector (detection area 100mm2) to JEM-ARM200F (HRP), a large light receiving area and the high resolution are simultaneously realized, and a clear distinction of light elements such as “B,C,N,O” is possible.

Dry SD100GV

High Speed Elemental Mapping

Dry SD100GV Detector featuring high sensitivity detects an Au catalyst particle in only one minute of measuring time.

• Specimen: Au Catalyst Particle supported on Ti Oxide

• Instrument: JEM-ARM200F + Dry SD100GV Detector

• Measurement Time Approx: 1 minute

• Probe Current: 1nA

• Pixel Number: 256 x 256 pixels

• Atomic Resolution Mapping

• Atomic columns of Sr and Ti are clearly segregated.

Atomic Resolution Mapping

Atomic columns of Sr and Ti are clearly segregated.

• Specimen: SrTiO3<100>

• Instrument: JEM-ARM200F + Dry SD100GV Detector

• Measurement Time Approx.: 10 minutes

• Probe Current: 1nA

• Pixel Number: 128 x 128 pixels

Play Back

Elemental mapping data acquired by JEOL’s EDS conserves spectrum at every pixel for each frame, together with electron beam images. The “play back” function enables multilateral analyses including an observation of the change of spectrum over a period of time. A phenomenon occurring in the sample, which was impossible to be tracked down, can now be observed by replaying the analysis data. To cut out the frames you have selected is also possible. (A patent has been applied for.)

• Specimen: Rock Salt

• Pixel Number: 128 x 128 pixels

• Sample Frame Number: 398 frames

Application

Application JED-2300T

Structural Analysis of Semiconductor Devices by Using STEM/EDS Tomography

More Info