JEOL’s UHV-SPM Allows You to Obtain Accurate Surface Information
Features
Technology That Supports SPM
Stacked-share made scanner
As the scanner, which is the heart of the SPM, a JEOL-developed stacked-share mode scanner is employed. It eliminates the image distortion caused by the interference between piezo elements and satisfies three requirements for obtaining high resonance frequency-"handy," "small," and "lightweight".
Specimen stage
The specimen stage, based on JEOL's most excellent precision EM-related technique, is of the top entry structure. This structure incorporates not only the idea of nanometer control of the specimen, but also the idea of "drift-free".
Providing the concentric diffusion from it, the stage allows stable SPM observation, thus displaying its effectiveness for in site observation. Furthermore, the specimen surface is largely opened, permitting addition of many new functions.
Coarse movement mechanisms
These mechanisms require the finest movements in the SPM. They allow the tip to safely approach a nanometer region without causing the tip to hit the specimen. The tip can be automatically moved correctly by motor drive from outside of the vacuum.
Control Circuit
Tunneling currents that are detected by SPM are weak currents of the nanoampere order, making it necessary to constantly study the noise problem.Also, the feedback circuit needs to be sufficiently resistant to oscillation. These techniques, completed through the development of scanning microscope, are effective also for SPM.
This control circuit can be used commonly for AFM.
WINSPM system
The WINSPM system is an integrated control and data acquisition system developed for scanning probe microscope. It allows not only SPM, l-V, STS, AFM, Force-Curve and LFM observation, but also simultaneous input and simultaneous display of up to 4 channels. Besides, it is provided with more than 100 image processing functions and more than 30
graphic processing functions. Employing MS-windows, it allows the change to other applications (TIFF type) and network connection to be carried out with ease.
User-friendly Window system
The WINSPM software, which operates on MS-Windows offers a full mouse operation environment. Provided with GUIs such as a menu system and dialog box, it can be simply operated by anybody. Also equipped with a large-capacity memory, it can be smoothly operated even when many windows are opened at a time.
Control panel for maximum functional efficiency
The operational ease of the control panel is very important for AFM and SPM scanning. The WINSPM system is provided with frequently-used parameters that were carefully selected on the basis of past results. Finer parameter setting can be freely done by use of the dialog box. Functions such as STS, CITS, and LITHOGRAPHY are all provided as standard.
Abundant image processing function
The WINSPM system is provided with more than 100 types of image processing functions specifically developed for SPM, which include 3D display, profiling, FFT, expansion, and particle analysis.
Provided with a magnetooptical disk as standard, the WINSPM system allows full back-up of important data that outputs data to a laser printer or a color hard copier.
Optional functions include the connection of the second monitor, which is used exclusively for image display, real-time output to VTR, and image input and processing from VTR.
3-independent-chamber evacuation system
The ultrahigh vacuum evacuation system consists of three chambers, which can be evacuated independently. Thus, the system is constructed as a multitask chamber which gives the individual chambers their respective roles. At the same time, this evacuation system is well balanced overall so as to provide ultrahigh vacuum.
Vibration isolation system
The vibration isolation system is an important factor for the SPM, which possesses an atomic or molecular-level resolution. Mechanical vibrations are fully isolated by directly connecting the vacuum chamber and the SPM to a gimbal-piston type air-suspended vibration isolation system, which possesses excellent vertical and horizontal vibration isolating characteristics, and also by employing the basic SPM a top-hatstack type vibration mechanism, which isolates both horizontal and vertical vibrations.
Abundant additional functions
Evaporator
This is used to vacuum evaporate the specimen with atoms different from specimen atoms. It is provided with two 70-mm-dia. ports that face the specimen. Provisions are made for carrying out evaporation from below at an angle of 40°, and evaporation can be done without contaminating portions other than the specimen as the ion source is collimated.
Heating device
Specimen heating is an indispensable function for specimen cleaning and for research of phase transition at high temperatures and of surface structures. Also, MBE requires a function to heat the specimen indirectly. The heating device has been developed to meet these needs.It allows not only specimen flashing, but also specimen observation while heating it.
Cooling device
Like specimen heating, specimen cooling is also needed for research of phase transition of substances...in this case under low temperatures. It is especially effective for observing superconducting materials at low temperatures.
Ultrahigh vacuum scanning electron microscope (UHV-SEM)
The SPM, which is well suited for atomic and molecularlevel image observation, is not suited for wide area observation.However, it is natural for SPM users to wish to observe enlarged images of their desired fields of view.Addition of the SEM function assures not only the identification of the viewing area with the SPM, but also a wide range of observations from low-magnification observation to SPM observation. Also, the observation capability for the relationship between the specimen and the tip and for the tip state, is very effective for enhancing research efficiency.The newly-developed column for this UHV-SEM uses no cooling water to isolate vibrations, and is constructed so as not to impair ultrahigh vacuum. This has eliminated the influence of vibrations on image observation and the fear of specimen contamination.
The development of the ultrahigh vacuum SPM-SEM promises the expandability of the SPM by complementing their respective defects.
Specifications
| Resolution | |
|---|---|
| Horizontal | 0.14 nm (STM) Atomic resolution (AFM) |
| Vertical | 0.01 nm (STM) Atomic resolution (AFM) |
| Mechanical movements (Driven by motors) | |
| Z movement (approach function): | Coarsely controls tip-specimen distance. |
| Auto approach mechanism | Built-in |
| X and Y movements (specimen shift function)Movement ranges | X and Y: 4 mm (±2 mm) (STM)
X and Y: 2 mm (±1 mm) (AFM) |
| Center position indicator | Buillt-in |
| Scanner | |
| Type | Stack share (STM). Tube (AFM) |
| Maximum movements | X and Y: 0.2 µm (200 nm), Z: 0.6 µm (STM)
X and Y: 10 µm, Z: 2.7 µm (AFM) |
| Scan rotation | Provided (–180 to +180°) |
| Scan range | |
| Variable range | 0 to 200 nm (variable in 12-bit step) (STM)
0 to 10 µm (variable in 12-bit step) (AFM) |
| Zoom function | Provided |
| Specimen | |
| Number of specimens per load | One (MGL is used for specimen exchange) |
| Specimen size | 10mm×10mm×5mm (t) max.(STM)
8mm×7.7mm×2mm (t) max.(AFM) 1mm×7mm×0.3mm (t) for heating |
| Specimen heating mechanism | |
| Heating method | Direct heating by specimen resistance |
| Heating temperature | R.T. (room temperature) to 1200°C or more |
| Drift | |
| System drift | 0.05 nm/s or less (at R.T. and high temperature) |
| Specimen treatment chamber | For specimen treatment, and tip and specimen parking |
| Ultimate pressure | Approx. 10 –7Pa |
| Specimen airlock | For tip and specimen exchange |
| Ultimate pressure | Approx. 10 –4Pa |
| Bakeout heater | Buillt-in |
More Info
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