JSM-6510 Series Scanning Electron Microscope
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A general-purpose, thermal type SEM to meet the needs of a wide range of users with built-in standard recipes. A wealth of available options, such as Cryo, further expands the range of applications.
Features
Operation navigation
The operation navigation screen displays a variety of navigation functions.
The specimen exchange procedure is presented in a flow format, so that the process can be easily completed even by a first time user.
When the motor-drive stage option installed, a stage graphic makes it easy to search for a target site When the stage navigation system (option) is used, it is possible to locate a region of interest with the feel of operating an optical microscope.
Video animations supplement the maintenance procedure explanations
Standard recipes
Standard recipes incorporating JEOL expertise and experience are pre-installed
Even new SEM users can set conditions suitable for each sample
Wide range of options
A variety of options can be installed, including a cryo system and a cool stage
Since the EDS is also a JEOL product, control can be performed from a single PC
EDS integration
Analysis can be started from the SEM window
Since the EDS is also a JEOL product, control can be performed from a single PC
Specifications
| ResolutionHV mode | 3.0 nm（30 kV）、8 nm（3 kV）、15 nm（1 kV） |
|---|---|
| LV mode *1 | 4.0 nm（30 kV） |
| Magnification | × 5 to × 300,000 (on 128 mm × 96 mm image size) |
| Preset magnifications | 5 step, user selectable |
| Standard recipe | Built in |
| Custom recipe | Operation conditions (Optics, Image mode, LV pressure*1) Specimen stage |
| Image mode | Secondary electron image, REF image, Composition*1, Topography*1, Shadowed*1 |
| Accelerating voltage | 0.5 kV to 30 kV |
| Filament | Factory pre-centered filament |
| Electron gun | Fully automated, manual override |
| Condenser lens | Zoom condenser lens |
| Objective lens | Super conical objective lens |
| Objective lens apertures | 3 stages, XY fine adjustable |
| Stigmator memory | Built in |
| Electrical image shift | ± 50 μm (WD = 10 mm) |
| Auto functions | Focus, brightness, contrast, stigmator |
| Specimen stage | Eucentric large-specimen stage
X: 80 mm, Y: 40 mm, Z: 5 mm to 48 mm, Tilt: −10° to 90°, Rotation: 360° |
| Reference image (Navigator*3) | 4 images |
| Specimen exchange | Draw out the stage |
| Maximum specimen | 150 mm diameter |
| PC | IBM PC/AT compatible |
| OS | Windows 7 |
| Monitor | 19 inch LCD, 1 or 2*2 |
| Frame store | 640 × 480, 1,280 × 960, 2,560 × 1,920, 5,120 × 3,340 |
| Dual live image | Built in |
| Full size image display | Built in |
| Pseudo color | Built in |
| Multi image display | 2 images, 4 images |
| Digital zoom | Built in |
| Dual magniἀcation | Built in |
| Network | Ethernet |
| Measurement | Built in |
| Image format | BMP、TIFF、JPEG |
| Auto image archiving | Built in |
| Pumping system | Fully automated, DP: 1, RP: 1 or 2*1 |
| Switching vacuum mode*1 | Through the menu, less than 1 minute |
| LV Pressure*1 | 10 to 270 Pa |
| JED-2300 EDS*2 | Built in |
Principal Options
Backscattered electron detector*1
Low vacuum secondary electron detector
Energy dispersive X-ray analyzer (EDS)
Wave length dispersive X-ray analyzer (WDS)
EBSD
Stage navigation system
Airlock chamber
Chamber scope
Operation keyboard
LaB6 electron gun
Report creation software (SMile View™)*2
Operation console (750 mm wide, 900 mm wide)
Motor controlled stage (2 axes, 3 axes, 5 axes)
Standard on JSM-6510LA and JSM-6510LV
Standard on JSM-6510LA and JSM-6510A
Available when the motorized specimen stage is provided.
Application
Application JSM-6510series
High Angle Backscattered Electrons and Low Angle Backscattered Electrons
Introducing the ALTO Series (Cryo System)
Introducing Cryo Scanning Electron Microscopy
Gallery
More Info
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