JEBG series
High-power electron beam sources
High-power electron beam sources for vacuum evaporation of metals and metal-oxides to a wide plastic film or a large glass plate that are continuously fed. And also used for vacuum melting of high-melting point metals.
Features
Electron beam can be swept a wide area at high speed. Various beam irradiation patterns and areas can be created by dedicated control device and software. Sweeping, dwell time, output power and beam shape at each irradiation position can be set up individually, thus can control melting surface and film thickness distribution.
Applications
Vacuum deposition
Gas barrier films, protective films, electrode films, conductive films, magnetic storage films.
Vacuum melting
Refinement/Ingot production of high-melting-point metals such as Ti, Ta, Nb and Mo.
Polycrystalline silicon refining for solar cell.
High-power electron beam source
Click the "replay" button in the box above, and the movie will start (for 1 minute)
This movie includes some light flashing moments.
Watching the movie may affect you physically, such as attack/stroke or may make you feel bad.
When you watch it, please keep a reasonable distance from the movie in a bright room. Your careful attention is appreciated.
2 line scanning
Click the "replay" button in the box above, and the movie will start (for 1 minute)
This movie includes some light flashing moments.
Watching the movie may affect you physically, such as attack/stroke or may make you feel bad.
When you watch it, please keep a reasonable distance from the movie in a bright room. Your careful attention is appreciated.
Specifications
| Model | EBG-300UA | JEBG-1000UB | JEBG-3000UB |
|---|---|---|---|
| Maximum output | 30kW
(20kV, 1.5A) |
100kW
(30kV, 3.4A) |
300kW
(40kV, 7.5A) |
| Beam deflection angle | Max. ±30° | ||
| Sweeping direction | X, Y axis | ||
| Maximum sweeping frequency | 300Hz | 200Hz | 200Hz
(300Hz: Option) |
| Corresponding power supply | ST-30BE2 | JST-100C | JST-300CHR |
Catalogue Download
JEBG series High-power electron beam sources
Application
Application JEBGseries
More Info
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