High-power Electron Beam Source used for Melting Metal Materials ：Vacuum melting furnace for polycrystalline silicon refinement
JEOLnews Volume 43, Number 1, 2008
JEBG-3000UB is a high-power electron beam source of 300kW output and is used for vacuum melting/refining of metal material. As the example, the melted purification process, metallurgical method, in the polycrystalline silicon manufacturing process for solar cells is introduced.
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