The EC-52000IC Ion Cleaner is a device that holdsa specimen of an electron microscope underglow discharge, for removing hydrocarboncontaminants adhered to the specimen byutilizing physical and chemical reactions.The Ion Cleaner prevents specimen contamination,which arises from accumulations of hydrocarboncontaminants when the specimen is irradiatedwith an electron beam in an electron microscope.
Features
You can perform specimen treatment while the specimen is being placed on the specimen holder.
You can perform cleaning without introducing special gas.
Applicable specimen holders
For TEM: EM-21010(SCSH) and same shaped specimen holders
For SEM: JSM-7000F series 12.5 mm-dia. specimen holders
Specifications
| Discharge method | Planar electrode type |
|---|---|
| Working pressure | 35 to 40 Pa |
| Target | Carbon |
| Vacuum chamber | About 120 mm (I. D.) × About 40 mm (H) |
| Discharge voltage | Variable |
| Timer | 1, 5, 10, 15, 30, 60 min |
| Rotary pump | 10 L/min |
Installation Requirements
| Power | 100 V AC, 50/60 Hz, 200 VA | |
|---|---|---|
| Dimensions and weights |
Main unit | 250 mm (W) × 350 mm (D) ×260 mm (H), about 11 kg |
| Rotary pump | 130 mm (W) × 228 mm (D) ×165 mm (H), about 5.5 kg | |
| Conditions of use |
Room temperature |
20±5 ℃ |
| Humidity | 60% or less | |
Specifications subject to change without notice.
More Info
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