Neo Comfort
FE-SEM Acoustic Enclosure
Features
Neo Comfort for Optimum FE SEM Performance
JEOL's FE-SEM acoustic enclosure enhances imaging performance in room environments that are not ideal.
Examples include interference from: noise, airflow changes, magnetic disturbance*, and vibrations*
* Option
With Neo Comfort
Without Neo Comfort
Model: JSM-IT810 <SIL>
Landing voltage: 15 kV
WD: 4.5 mm
Signal: Secondary electron
Acoustic noise environment: 90 dB
Specimen: Cu metal interconnects
Easy Access to the SEM
Neo Comfort includes a touchscreen panel which displays instrument status and an internal light for easy viewing. Its user-friendly design allows easy access for specimen exchange and maintenance.
One-hand opening and closing of the door
Mounting 4-inch SiC wafer
Specifications
| Size | 1,400 mm (W) × 1,730 mm (D) × 2,250 mm (H) |
|---|---|
| Weight | 1 t / m2 or less (including FE-SEM) |
| Emergency stop button | Included in the standard configuration |
| Touchscreen | Displays the instrument status such as vacuum level |
| Noise cancelling performance | Reduction by 5 dB or more at 140 Hz or higher |
| Light inside the enclosure | Included in the standard configuration |
| Fixation | Possible using anchor bolts |
| Magnetic field canceller | Can be built in* |
| Flat-type vibration-isolation table | Can be built in* |
| Warning lamp | Can be installed* |
* Option
Catalogue Download
Neo Comfort FE-SEM Acoustic Enclosure
Related Products
JSM-IT810 Schottky Field Emission Scanning Electron Microscope
More Info
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