JSM-7700F Field Emission Scanning Electron Microscope
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Features
The JSM-7700F is the only aberration (Cs and Cc) corrected SEM on the market. The JSM-7700F also offers unprecedented resolution of 0.6nm at 5kV, and dramatically extends the useful resolution of SEM technology for development of devices at the nanometer scale. It is optimized for low kV operation crucial in cross-sectional analysis of semiconductor devices. Using the JSM-7700F, the SEM operator can clearly image oxide and nitride depositions and investigate complex device characteristics with metrology. The SEM features JEOL’s patented “in-lens” backscattered electron detector technology and a Piezo-controlled, multi-sample, goniometer stage for precise, stable stage movements at the nanometer level."
Application
Application JSM-7700F
High Angle Backscattered Electrons and Low Angle Backscattered Electrons
More Info
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