JSM-7600F Schottky Field Emission Scanning Electron Microscope
DISCONTINUED
A semi in-lens SEM with high resolution. The adoption of a High Power Optics irradiation system delivers high-resolution, high-speed, high-accuracy element analysis. The incorporation of the Gentle Beam enables top-surface imaging of a specimen at very low energies of several hundred eV.
Features
This page contains the following errors:error on line 1 at column 5579: xmlParseCharRef: invalid xmlChar value 8 Below is a rendering of the page up to the first error.Semi-in-lens provides high-resolution observation and analysis
High resolution observation and high spatial resolution analysis is achieved through the combination of a semi-in-lens type objective lens that can collimate the electron beam even at low accelerating voltages, and the in-lens Schottky electron source that provides a stable current over a long service life.
Gentle Beam (GB) provides top-surface imaging with ultra-low energy incident electrons
A Gentle Beam (GB mode) with better resolution than the normal mode is available. In GB mode a bias voltage is applied to the specimen while the electron beam is emitted, allowing top-surface imaging with only several hundred eV of incident electron, making it possible to obtain high resolution images of samples that have been difficult to observe until now.
High Power Optics delivers high-speed, high-precision analysis
High Power Optics are adopted for the optical system, providing not only high-resolution imaging, but also stably delivering high-speed, high-precision analysis, including element analysis.
Application examples
Applicaton1 High resolution observation by the semi-inlens objective lens
Specifications
| SEI resolution | 1.0nm（15kV）, 1.5nm（1kV） | ||
|---|---|---|---|
| Magnification | 25 to 1,000,000 (on the image size 120mm 90mm) |
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| Accelerating voltage | 0.1kV to 30kV | ||
| Probe current | 1pA to 200nA | ||
| Aperture angle control lens | Built-in | ||
| Detectors | Upper detector, lower detector | ||
| Energy filter | New r-filter | ||
| Gentle Beam | Built-in | ||
| Digital image | 1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels | ||
| Specimen airlock chamber | One-action specimen exchange mechanism built-in | ||
| Specimen stage | Eucentric, 5 axes motor control | ||
| Type | IA | II | III |
| X-Y | 70mm×50mm | 110mm×80mm | 140mm×80mm |
| Tilt | -5° to ～＋70° | -5° to ＋70° | -5° to ＋70° |
| Rotation | 360° | 360° | 360° |
| WD | 1.5mm to 25mm | 1.5mm to 25mm | 1.5mm to 25mm |
| Evacuation system | Two SIPs, TMP, RP | ||
| Eco design | During normal operation : 1.2kVA During the sleepmode : 1kVA During the evacuation system OFF : 0.76kVA |
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CO2 Emission
| CO2/hour | CO2/year | |
|---|---|---|
| During normal operation | 0.481kg | 4,214kg |
| During the sleep mode | 0.411kg | - |
| During the evacuation system OFF (Ion pump ON) |
0.286kg | - |
Principal Options
etractable Backscattered Electron Detector (RBEI)*1 Low Angle BE Detector (LABE)*2
Wavelength Dispersive X-ray Spectrometer (WDS)
Energy Dispersive X-ray Spectrometer (EDS)
Electron Backscatter Diffraction (EBSD) System
Scanning Transmission Electron (STEM) Detector
Cathodoluminescence Detector (CLD)
Liquid Nitrogen Trap (LNT)
For EDS analysis
For high magnification observation
Application
Application JSM-7600F
High Angle Backscattered Electrons and Low Angle Backscattered Electrons
Gallery
More Info
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