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IB-29510VET
Vacuum Evaporator

The IB-29510VET Vacuum Evaporator facilitates specimen preparation for electron microscopes.
Evaporation of carbon thin films suitable for high-resolution observation, evaporation of various metal thin films, shadowing evaporation, or conductive coating for non-conductive materials.
It can be also used for thermal processing requiring high vacuum, such as aperture-foil cleaning for electron microscopes and experimental purposes.

Features

  • Evaporation of carbon thin films suitable for high-resolution observation

  • Evaporation of various metal thin films

  • Conductive coating for non-conductive materials

  • Shadowing evaporation of various metals

  • Thermal processing, such as aperture-foil cleaning for electron microscopy

Specifications

Ultimate pressure 1×10-4 Pa or less
(Without use of the liquid nitrogen trap)
Pressure measurement B-A gauge and and Pirani gauge
Pressure display B-A gauge digital display (Auto switch range)
Bell jar Height 250 mm × Outside 250 mm diameter 250 mm,
made of glass
Evaporation power supply 10 V AC, 50 A
Evaporation electrode
  • Carbon holder 1 set
  • Tantalum boat holder. 1 set
  • Heater holder 1 set (with electrode isolation board)
Shutter for specimen 1 (manual)
Turbo molecular pump (TMP) 240 L/s
Oil rotary pump (RP) 100 L/min
  • Specifications subject to change without notice.

Installation Requirements

Power supply Single phase 100 V AC (±10%), 50/60 Hz, 1.5 kVA
  • Construction related to distribution equipment and grounding is not included in the standard work.
Grounding 100 Ω or less
Room temperature 15 to 30 °C
Room Humidity 60% or less (no condensation)
Dimensions H 1,287 mm × W 800 mm × D 550 mm
Weight Approximately 150 kg
Installation space H 2,000 mm or more × W 1,200 mm × D 1,200 mm
Entrance H 1,300 mm × W 800 mm
Eathquake-proof measures This equipment can be secured with an anchor bolt
  • The anchor fixing clamp is not included in the standard work.

Options

  • Rotating Tilt Specimen Stage (IB-21500RTS)

  • Liquid Nitrogen Trap (IB-21510LNT)

  • The liquid nitrogen trap (IB-21510LNT) can be ordered at the same time as the basic unit as an initial option and will be delivered with the basic unit after installation at the factory. If it is ordered after the delivery of basic unit, the basic unit needs to be returned to the factory. The basic unit will be delivered again with the liquid nitrogen trap installed at the factory.

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