Features
Highly stable probe current and aperture control lens facilitate high resolution image acquisition. The milling process is simultaneously viewed and analyzed in SEM imaging, effective for inner structure analysis and TEM thin film sample preparation.
Incorporates a high resolution FE-SEM for precision cross sectioning.
High resolution SEM imaging for real time monitoring of FIB milling.
Incorporates an in-lens thermal electron gun capable of stable high speed analysis at a maximum current of 200 nA.
Multi port specimen chamber for a complete operation from FIB milling to SEM imaging to analysis by a variety of detectors including EDS and EBSD.
Supports simultaneous installation of multiple gases for protective film deposition.
High resolution SEM imaging for TEM thin film sample preparation.
Accesories
EDS (energy dispersive fluorescent X-ray analyzer)
EBSD system
CLD (cathode luminescence detector)
IR-CAM (IR camera for viewing)
GIS (gas injection system) x3
Specimen pick up system
Nano manipulator system
PCD (probe current detector)
AEM (absorbed current meter)
TED (transmission electron detector)
BEI (backscattered electron detector)
Liquid nitrogen trap
Beam blanking device
3D Reconstructin software
Specifications
FIB (Focused Ion Beam)
| Ion source | Ga liquid metal ion source |
|---|---|
| Accelerating voltage | 1 to 30 kV |
| Magnification | 30x (view area search) 100 to 300,000x |
| Image resolution | 5 nm (at 30 kV) |
| Maximum beam current | 30 nA (at 30 kV) |
| Variable aperture | 12 steps, motor drive |
| Ion beam milling pattern | Rectangle, line, spot |
SEM (Electron Beam)
| Accelerating voltage | 0.2 to 30 kV |
|---|---|
| Magnification | 20 to 1,000,000x |
| Image resolution | 1.2 nm guaranteed (accelerating voltage 30 kV)
3.0 nm guaranteed (accelerating voltage 1 kV) |
| Maximum beam current | 200 nA |
| Specimen stage | Goniometer stage
X: 50 mm; Y: 50 mm; Z: 1.5 to 41 mm; T: -5 to 70°; R: 360° |
| Vacuum pump | 2 SIPs (SEM), 1 SIP (FIB), 1 TMP, 1 RP |
Installation Requirements
| Power supply | Single phase 200 V 10%, 50/60 Hz. 6 kVA |
|---|---|
| Ground terminal | One Type D (100 ohm or less) |
| Room temperature | 20°C±5°C |
| Humidity | 60% or less |
More Info
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