High-voltage power supplies for use with deflection-type electron beam sources
Features
The JST-F series offers excellent stability and has been the choice of many users.
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Specifications
| Model | JST3F | JST-10F | JST-16F | |
|---|---|---|---|---|
| Output | Maximum output | 6.4kW | 10kW | 16kW |
| Accelerating voltage | -4kV to -8kV | -4kV to -10kV | ||
| Emission current | 0 to 0.8A | 0 to 1A | 0 to 1.6A | |
| Filament current | Maximum 40A | |||
| Accelerating voltage ripple rate | 5% or less (maximum output) | |||
| Deflection coil output | 0 to 2A | |||
| Sweeping coil output | Maximum frequency 500 Hz(※), Maximum output 8 Ap-p, ± 2 A DC | |||
| Interlock | External: 3 points, Internal 5 points | |||
| External signal | INPUT : 16 types, OUTPUT: 9 types | |||
| Power supply input (50/60 Hz) | 3 phase 200 V ± 10%, 10 kVA | 3 phase 200 V ± 10%, 15 kVA | 3 phase 200 V ± 10%, 25 kVA | |
| External dimensions | Power supply main unit | 570mm(W)×760mm(D)×1,545mm(H) | ||
| Operation panel | 481mm(W)×300mm(D)×150mm(H) | |||
| Mass | Approximately 360kg | Approximately 390kg | Approximately 450kg | |
| Grounding | Ground resistance 10 Ω or less | |||
The frequency used will vary according to the electron beam source
Attachments
ST-AS10F/ST-AS10G Arc Suppressor
Suppresses arcing during electron beam evaporation. Suppresses noise during arcing, and prevents interruption of the vapor deposition.ST-AS10F has a 2 stage arcing suppression circuit, and ST-AS10G has a 1 stage arcing suppression circuit.
| Model | ST-AS10F | ST-AS10G |
|---|---|---|
| Applicable accelerating voltage/ current | -4kV 〜 -10kV 1.6A 以下 | |
| Operating pressure | 6 × 10-2 Pa 以下 | |
| Interruption time of the electron beam | 0.5ms or less* | 0.1ms or less |
| Accelerating voltage overshoot during recovery | 20％/3 ms or less | |
| Increased current of the rectifier wave during arcing | 1 A, 100 μS or less | |
Interrupt time during operation up to the 2nd stage
ST-203 Simultaneous Multi Electron Beam Source Unit
This is used when 2 electron beam sources will be used simultaneously with 1 power supply. There will be 2 operation panels, each one is assigned for dedicated operation of one of the 2 electron beam sources.
It is possible to use different types of electron beam sources,but there may be limitations on the accelerating voltage range, etc. depending on the combination.
ST-EXTSIG External Signal Control
Incorporated in to the operation panel. In addition to the standard 9 types of external control signals, enables the external output of various other signals, such as the emission current confirmation signal
Cable configuration
| Type | Name | Model | Length |
|---|---|---|---|
| W1 W2 W8 |
E1/E2/ grounding | BS-64410L06W128 | 6m |
| ST-10MW128 | 10m | ||
| ST-15MW128 | 15m | ||
| W3 W4 |
Coil/HV (2 coiles) | BS-64420L06W34 | 6.5m / 5.5m |
| ST-10MW34 | 10m | ||
| ST15MW34 | 15m | ||
| W5 | Emission return | BS-64430L06W5 | 5.5m |
| ST-10MW5 | 10m | ||
| ST-15MW5 | 15m | ||
| W6 W7 |
Interlock/EB source ON | BS-64440L06W67 | 6m |
| ST-10MW67 | 10m | ||
| BS-64540L15W67 | 15m | ||
| W9 | Remote | BS-64450L06W9 | 6m |
| ST-10MW9 | 10m | ||
| ST-15MW9 | 15m |
Related Products
Related Products
BS-64010SCT Scan Controller
The melted remains of deposition materials can be improved using various calibrations of the electron beam scan signals of the electron gun power supply.(for JST-F power supply）
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