High-voltage power supplies for use with deflection-type electron beam sources
The JST-F series offers excellent stability and has been the choice of many users.
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|Accelerating voltage||-4kV to -8kV||-4kV to -10kV|
|Emission current||0 to 0.8A||0 to 1A||0 to 1.6A|
|Filament current||Maximum 40A|
|Accelerating voltage ripple rate||5% or less (maximum output)|
|Deflection coil output||0 to 2A|
|Sweeping coil output||Maximum frequency 500 Hz(※), Maximum output 8 Ap-p, ± 2 A DC|
|Interlock||External: 3 points, Internal 5 points|
|External signal||INPUT : 16 types, OUTPUT: 9 types|
|Power supply input (50/60 Hz)||3 phase 200 V ± 10%, 10 kVA||3 phase 200 V ± 10%, 15 kVA||3 phase 200 V ± 10%, 25 kVA|
|External dimensions||Power supply main unit||570mm(W)×760mm(D)×1,545mm(H)|
|Mass||Approximately 360kg||Approximately 390kg||Approximately 450kg|
|Grounding||Ground resistance 10 Ω or less|
The frequency used will vary according to the electron beam source
ST-AS10F/ST-AS10G Arc Suppressor
Suppresses arcing during electron beam evaporation. Suppresses noise during arcing, and prevents interruption of the vapor deposition.ST-AS10F has a 2 stage arcing suppression circuit, and ST-AS10G has a 1 stage arcing suppression circuit.
|Applicable accelerating voltage/ current||-4kV 〜 -10kV 1.6A 以下|
|Operating pressure||6 × 10-2 Pa 以下|
|Interruption time of the electron beam||0.5ms or less*||0.1ms or less|
|Accelerating voltage overshoot during recovery||20％/3 ms or less|
|Increased current of the rectifier wave during arcing||1 A, 100 μS or less|
Interrupt time during operation up to the 2nd stage
ST-203 Simultaneous Multi Electron Beam Source Unit
This is used when 2 electron beam sources will be used simultaneously with 1 power supply. There will be 2 operation panels, each one is assigned for dedicated operation of one of the 2 electron beam sources.
It is possible to use different types of electron beam sources,but there may be limitations on the accelerating voltage range, etc. depending on the combination.
ST-EXTSIG External Signal Control
Incorporated in to the operation panel. In addition to the standard 9 types of external control signals, enables the external output of various other signals, such as the emission current confirmation signal
|Coil/HV (2 coiles)||BS-64420L06W34||6.5m / 5.5m|
|Interlock/EB source ON||BS-64440L06W67||6m|