BS-60610BDS
Bombardment Deposition Source
Less damage of Backscattered electrons and X-ray/Splash reduction/Large capacity liner/High-rate deposition
Features
BS-60610BDS is a unique deposition source that indirectly heats an evaporation material in a liner with electron beam.
The liner capacity and deposition rate have increased compared to the conventional model of BS-60310BDS.
No damage to the substrate due to backscattered electron and X-rays.
Suitable for low-defect film deposition with little splash.
Excellent deposition rate control and stability is realized by high-speed electron beam heating control.
Thick film deposition by Increasing liner capacity.
Higher deposition rates are possible by increasing the maximum output and the evaporation area compared to BS-60310BDS.
Standard specifications(Photo liner is optional)
Principle of evaporation
Liner capacity/Comparison of maximum deposition film thickness*
In the case of the distance of source to substrate is 1100 mm
| Evaporation material | BS-60310BDS | BS-60610BDS | Ratio |
|---|---|---|---|
| Liner capacity Fluoride | 7.5cc | 12.8cc | 1.7 times |
| Liner capacity Aluminum | 1.5cc | 9cc | 6 times |
| Max film thickness MgF2 | 200nm | 400nm | 2 times |
| Max film thickness LaF3 | 90nm | 400nm | 4.5 times |
| Max film thickness AI | 250nm | 2,500nm | 10 times |
Residue after evaporation
Melting marks MgF2
Melting marks AI
Comparison of presence of particles in the deposited MgF2 film
White sheet glass of 76mm square,
T-S distance : 1.1m, Film thickness: 150nm
UV band spectral characteristics of MgF2 single layer
Aluminum deposition rate at each e-beam power
Example of electron beam sweep pattern
Advanced Circle Scan by BS-720xxICE series EB Power Supply
Specifications
Standard specifications
| Power | Maximum 4.8kW ※1 |
|---|---|
| Cooling water | 4 to 5L / min, 10 to 25°C |
| Working pressure | 5×10-5 to 1×10-2Pa |
| External dimensions | 345ｍｍ(W)×355.5mm(D)×181.5mm(H) |
| Mass | 22kg |
| EB Power Supply | BS-720xxICE series with Advanced Circle Scan mode |
Standard configuration
| BS-60610BDS | Bombardment Deposition Source 6-liner type ※2, ※3 |
|---|
Optional Accessories
| BS-60600RF | Roof ※4 |
|---|---|
| BS-60620LN | Liner（for fluoride, Au, Ag, Cu, etc.） |
| BS-60660LN | Liner（for Al） |
| BS-60680SP | Spacer ※5 |
| BS-60690SK | Cover ※5 |
The maximum output depends on the liner type.
Liners are not included in BS-60610BDS.
Please use the optional liners as the liner effects the deposition performance.The number of liners can be changed as a custom-built product.
Used to suppress the temperature rise of the substrate.
Need to select either the Cover(recommended) that improves heating efficiency or the Spacer.
Catalogue Download
BS-60610BDS Bombardment Deposition Source
More Info
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