- 16kW output
The maximum output is 16kW (1.6A at 10kV). Higher rate metal deposition is possible.
- Large capacity crucible
Standard crucible pocket size is 50mm in diameter.
70 to 80mm in diameter crucible can be used with the optional pole pieces BS-60830PP250.
*Beam movable/sweeping range is 50mm in diameter.
- High-speed sweeping
Beam sweeping performance has been improved compared to conventional e-beam source for metal deposition.
Oxides such as sublimation materials can be deposited by high-speed sweeping at 500Hz or more.
- Easy maintenance
The top is flat structure (less vapor deposition) and the top cover is easily removable.
Filament can be replaced without removing the copper wire of the high-voltage line.
- Backscattered electron trap
An optional backscattered electron trap is attachable.
It is highly efficient for decrease of substrate temperature rise, so it is suitable for the lift-off process.
Deposition rate examples of various metal materials
High-rate deposition is possible by high convergence electron beam
The example of aluminum deposition rate with large capacity cru cible
In combination with larger capacity crucible, it is possible to increase the deposition rate further.
|Maximum output||16kW(10kV, 1.6A)|
|Accelerating voltage||6 to 10kV|
|Electron beam deflection angle||270 degrees|
|Beam movement / Sweeping range||50mm in diameter|
|X axis sweeping frequency||135Hz(standard setting)|
|Y axis scanning frequency||570Hz(standard setting)|
|Operating pressure||7×10-2Pa or less|
|Cooling water||5 to 8L/min, 10 to 25°C|
|Filament||linear coil type, 0.8mm in diameter|
BS-60830PP250 Pole Piece (Long type)
Backscattered Electron Trap