differential pumping
differential pumping
Differential pumping means that the directly-connected two chambers in a microscope column isolated by a plate with a small hole (orifice) are individually evacuated. Using this evacuation system, it is possible to create a pressure difference (difference in degree of vacuum) between the two chambers.
For the low vacuum SEM, the chamber above the lens and the specimen chamber are differentially evacuated so that the electron source part is maintained at a high vacuum so as not to adversely affect the electron emission.
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