windowless detector

An EDS detector that does not use a window material (polymer thin film) to isolate vacuum. Since the windowless detector suffers no X-ray absorption by the window material, the detector has a high detection sensitivity for low-energy characteristic X-rays. The detector can analyze light elements down to lithium (Li) whose atomic number is 3. It should be noted that, when the specimen chamber is exposed to an atmospheric environment, the temperature of the detector must be returned to room temperature to prevent frost because it is used in a cooling state. In the low vacuum mode, the detector cannot be used because it suffers contamination.