pre-evacuation
pre-evacuation
"Pre-evacuation" is to evacuate the pre-evacuation chamber for the specimen holder from atmospheric pressure to a certain low pressure. In the pre-evacuation process, first the specimen pre-evacuation chamber is vented and a specimen is loaded on the specimen holder, and next the chamber is pre-evacuated, and finally the isolation valve is opened and the specimen is transferred to the specimen chamber.
Term(s) with "pre-evacuation" in the description


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