beryllium window EDS detector

An EDS detector that uses a beryllium film of 8 to 10 μm thickness as a window material to maintain vacuum of a semiconductor detector. Since the window material is robust, the detector is attached to and detached from the microscope column without worry of vacuum leakage. However, the detector is hard to detect elements lighter than sodium (Na) because the beryllium film absorbs low energy X-rays. For this reason, the detector has less been used in recent years.

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