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analysis region

analysis region

The size of the "analysis region" (spatial resolution) in EDS analysis is determined by not only the diameter of the incident electron beam but also the beam broadening within a specimen that depends on accelerating voltage, specimen thickness and constituent elements. For an accelerating voltage of 200 kV, the analysis region is 10 to 50 nm in diameter. The beam broadening decreases with the increase of the accelerating voltage.