double-deflection system
double-deflection system
The "double-deflection system" is designed in such a way that two pairs of deflection coils are arranged in the vertical direction. The "double-deflection system" is composed of two pairs of deflection coils. It is placed between the objective lens and the second condenser lens. The electron beam is deflected by the first-stage coils and then, the deflected electron beam is deflected again by the second-stage coils. The system is used for various purposes, such as adjustment of the accelerating voltage center, acquisition of a dark-field image without blurring due to spherical aberration of the objective lens, taking a STEM image, and hollow-cone beam illumination.
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