scroll pump
scroll pump
A dry vacuum pump that does not use oil. By rotating the scroll blade of the scroll pump, residual gasses are carried to the central part of the pump, are compressed and evacuated. Since oil is not used except a grease for the scroll shaft, the pump is oil-free and oil mist is not exhausted, which occurs for the rotary pump. The pump features low vibration and no noise. The working pressure is from 105 Pa to 1 Pa. Recently, requirements for an oil-free pump evacuation system are increasing even for the camera chamber. For such needs, a combination of the turbo-molecular pump and the scroll pump is adopted, instead of the diffusion pump.
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